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Grain boundary plays a key role in electromigration process of polycrystal interconnection. We take a free volume to represent a 'vacancy--ion complex' as a function of grain boundary specific resistivity, and develop a new characterisation model for grain boundary noise. This model reveals the internal relation between the boundary scattering section and electromigration noise. Comparing the simulation result with our experimental result, we find the source as well as the form of noise change in the electromigration process. In order to describe the noise enhancement at grain boundary quantitatively, we propose a new parameter—grain boundary noise enhancement factor, which reflects that the grain boundary noise can characterise the electromigration damage sensitively. 相似文献
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In order to explore how to extract more transport information from current fluctuation, a theoretical extraction scheme is presented in a single barrier structure based on exclusion models, which include counter-flows model and tunnel model. The first four cumulants of these two exclusion models are computed in a single barrier structure, and their characteristics are obtained. A scheme with the help of the first three cumulants is devised to check a transport process to follow the counter-flows model, the tunnel model or neither of them. Time series generated by Monte Carlo techniques is adopted to validate the abstraction procedure, and the result is reasonable. 相似文献
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