Institution: | 1. Nanostructured Materials, Department of Physics, Chemistry, and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden;2. SECO Tools AB, SE-737 82 Fagersta, Sweden;3. PLANSEE Composite Materials GmbH, DE-86983 Lechbruck am See, Germany;4. Thin Film Physics Division, Department of Physics, Chemistry, and Biology (IFM), Linköping University, SE-581 83 Linköping, Sweden |