| 纳米计量学的基础技术组件 |
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| 引用本文： | 叶贤基.纳米计量学的基础技术组件[J].天文研究与技术,2002(3):101-116. |
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| 作者姓名： | 叶贤基 |
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| 作者单位： | 工业技术研究院测量技术发展中心 台湾新竹300 |
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| 摘 要： | 为了满足ASTROD激光宇航动力学任务慨念计划的高精度要求 ,以及实现新质量标准 ,我们开始进行次纳米激光测长与纳米定位控制的研究。本文将回顾我们在清华大学与工研院测量中心的研究成果 ,介绍如何利用外差式激光干涉仪、挠性微动台与压电陶瓷 ,进行次纳米激光测长与纳米定位控制。此研究成果将做为ASTROD计划中 ,无拖曳航天技术的研发基础。之后讨论如何将纳米定位控制系统与扫描穿隧显微镜进行整合 ,完成计量型扫描穿隧显微镜 ,进一步将微结构的测量尺寸直接追溯至长度标准。
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| 关 键 词： | 激光宇航动力学 纳米计量学 次纳米级激光测长 纳米定位 挠性移动台 扫描穿隧显微镜 |
| 文章编号： | 1001-7526(2002)03-0101-16 |
| 修稿时间： | 2001年12月1日 |
Technical Elements of Nanometrology |
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| Yeh Hsien-Chi.Technical Elements of Nanometrology[J].Astronomical Research & Technology,2002(3):101-116. |
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| Authors: | Yeh Hsien-Chi |
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| Abstract: | In this lecture, we discuss the fundamental technical elements of nanometrology--the nanoscale, the nanoguide, the nanodrive, and the nanoprobe, review our research results at Tsing Hua University, and present some new results at Center for Measurement Standards/ITRI. In order to meet the precision requirement of laser metrology for ASTROD, and to realize the new definition of kilogram, we have studied the sub-nanometer laser metrology and built up a nanopositioning system consisting of heterodyne interferometer, flexure stage, and VMEbus real-time control system. We also integrated a nanopositioning system with a home-made scanning tunneling microscope to construct a calibrated STM that could provide the measurement of critical dimension of microstructure traceable to the SI unit of length. These two topics are the main focus of our discussion. |
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| Keywords: | ASTROD Nanometrology Subnanometer Laser Metrology Nanopositioning Flexure Stage canning Tunneling Microscopy (STM) |
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