| 振动测量用叉指式硅微加速度计性能研究 |
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| 引用本文： | 杜敏,林玮,路鹏,李建利.振动测量用叉指式硅微加速度计性能研究[J].地震工程与工程振动,2007,27(6):248-252. |
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| 作者姓名： | 杜敏 林玮 路鹏 李建利 |
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| 作者单位： | 1. 防灾科技学院,河北,三河,065201
2. 北京航空航天大学,仪器科学与光电工程学院,北京,100083 |
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| 基金项目： | 校级基金项目(06310) |
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| 摘 要： | 硅MEMS加速度仪可以用于地震以及各种工程振动的测量,目前其精度较低,温度灵敏度较高,为了掌握MEMS加速度计的特性,提高其实用性能,本文介绍了一种叉指式硅微机械加速度计(FMSA)表头微结构和系统的工作原理,推导了微结构梁的刚度,利用ANSYS有限元软件分析了FM-SA加速度计的静态特性、动态特性和温度特性,验证了推导的正确性,说明微结构参数是决定FMSA加速度计性能的主要因素,为改进加速度计性能提供了依据,并对其在振动观测领域实际应用提供了理论指导。
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| 关 键 词： | 振动观测 微机电 加速度计 有限元分析(FEA) 模态 |
| 文章编号： | 1000-1301（2007）06-0248-05 |
| 收稿时间： | 2007-03-10 |
| 修稿时间： | 2007-06-25 |
Performance analysis of finger-shaped micro-electromechanical silicon accelerometer applied to vibration measurement |
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| DU Min,LIN Wei,LU Peng,LI Jianli.Performance analysis of finger-shaped micro-electromechanical silicon accelerometer applied to vibration measurement[J].Earthquake Engineering and Engineering Vibration,2007,27(6):248-252. |
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| Authors: | DU Min LIN Wei LU Peng LI Jianli |
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| Abstract: | Micro-electromechanical silicon accelerometer can be applied to various vibration measurements.For comprehending its performance and improving its precision,this paper describes the microstructure and operation principle of a finger-shaped micro-electromechanical silicon accelerometer.The stiffness of microstructure was calculated theoretically.The static,dynamic and thermal characteristics were analyzed by using ANSYS software and the accuracy of theoretical model was verified.It is shown that the microstructure dimension is the main factor causing the performance of FMSA.The paper provides a theory for improving the performance of accelerometer. |
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| Keywords: | vibration measurement micro electromechanical accelerometer finite element analysis(FEA) mode |
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