| 用X射线荧光方法测定薄层、镀层和涂层厚度 |
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| 引用本文： | 敖奇,曹利国,丁益民.用X射线荧光方法测定薄层、镀层和涂层厚度[J].物探化探计算技术,1996(S5). |
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| 作者姓名： | 敖奇 曹利国 丁益民 |
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| 作者单位： | 北卡洛莱纳州立大学(敖奇)，成都理工学院(曹利国，丁益民) |
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| 摘 要： | 本文提出用特征 X射线的发射和吸收来测定薄层或表面涂层的厚度。从理论上解决了最佳能量的选择问题 ,使薄层厚度测定的检出下限大幅度优化。并通过实践证明了方法的可靠性和实用性
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| 关 键 词： | 薄层厚度测量 镀层厚度测量 X射线荧光方法 表层X射线荧光计数率法 底层X射线荧光吸收法 |
THICKNESS MEASUREMENT OF LAYER BY XRF |
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| Ao Qi,Cao Liguo Ding Yimin.THICKNESS MEASUREMENT OF LAYER BY XRF[J].Computing Techniques For Geophysical and Geochemical Exploration,1996(S5). |
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| Authors: | Ao Qi Cao Liguo Ding Yimin |
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| Institution: | Ao Qi Cao Liguo Ding Yimin (Naorth Carolina State University) (Chengdu Institute of Technology) |
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| Abstract: | The paper discusses the layer thickness measurement by emission and absorption of x-ray. The problem of best energy choice has been resolved theoretically, therefore, detection limits have been improved a lot pratically. The method is reliable and practical. |
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| Keywords: | thickness measurement layer plated layer count ratio of x-rey absorption of x-ray |
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