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基于长度标准装置提高激光跟踪仪测量精度的方法
引用本文:梁静,王铜,董岚.基于长度标准装置提高激光跟踪仪测量精度的方法[J].大地测量与地球动力学,2019,39(3):325-330.
作者姓名:梁静  王铜  董岚
作者单位:中国科学院高能物理研究所,北京市玉泉路19号乙,100049;东莞中子科学中心,广东省东莞市中子源路1号,523803;中国科学院高能物理研究所,北京市玉泉路19号乙,100049;东莞中子科学中心,广东省东莞市中子源路1号,523803;中国科学院高能物理研究所,北京市玉泉路19号乙,100049;东莞中子科学中心,广东省东莞市中子源路1号,523803
基金项目:国家自然科学基金;国家自然科学基金;国家重点研发计划
摘    要:为了提高激光跟踪仪的测量精度,针对激光跟踪仪测量重复性高的特点,提出基于长度标准装置对激光跟踪仪观测值进行标定的方法。通过建立激光跟踪仪和激光干涉仪标定观测的函数模型和随机模型,依据最小二乘原理得到标定点观测值的改正数和标定点观测值平差值的精度,进而对目标点的观测值进行插值改正,获得激光跟踪仪对目标点观测值的改正数,最终实现对激光跟踪仪的观测值进行误差补偿。采用长度标准装置对Leica AT401激光跟踪仪进行水平方向标定及标定后的精度测试,激光跟踪仪经过水平方向误差补偿后,将其测量点相互之间距离与激光干涉仪测量的距离进行对比,距离差值的RMS从19.5μm降低为10.2μm,验证了该方法的可行性。

关 键 词:激光跟踪仪  激光干涉仪  长度标准装置  测量标定  误差补偿

Method to Improve the Measurement Accuracy of Laser Tracker Based on the Length Standard Device
LIANG Jing,WANG Tong,DONG Lan.Method to Improve the Measurement Accuracy of Laser Tracker Based on the Length Standard Device[J].Journal of Geodesy and Geodynamics,2019,39(3):325-330.
Authors:LIANG Jing  WANG Tong  DONG Lan
Institution:(Institute of High Energy Physics,CAS,19B Yuquan Road,Beijing 100049,China;Dongguan Neutron Science Center,1 Zhongziyuan Road,Dongguan 523803,China)
Abstract:With increasingly higher precision requirements for workpiece manufacturing and assembly, measurement accuracy of instruments also need to be improved accordingly. In order to increase the measurement accuracy of laser trackers, which are characterized by high repeatability, a method of calibration based on length standard device is proposed. By establishing the function and stochastic models of the laser tracker and the laser interferometer observation in the process of the calibration, the correction value and the adjusted value of the observation for the calibration points are obtained according to the least squares principle. With interpolation on the correction value and adjusted value of the observation for the calibration points, we determine the correction value of observations for the practical points, and finally achieve the error compensation for the laser tracker. Horizontal direction calibration and accuracy testing are carried out for the Leica AT401 laser tracker with the length standard device, and the distances measured by laser tracker are compared with those measured by laser interferometer. After error compensation, the RMS of the distance differences is changed from 195 μm to 10.2 μm, verifying the feasibility of this method.
Keywords:laser tracker  laser interferometer  length standard device  measurement calibration  error compensation  
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