| 193nm ArF准分子激光系统对LA-ICP-MS分析中不同基体的剥蚀行为和剥蚀速率探究 |
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| 引用本文： | 吴石头,许春雪,Klaus Simon,肖益林,王亚平.193nm ArF准分子激光系统对LA-ICP-MS分析中不同基体的剥蚀行为和剥蚀速率探究[J].岩矿测试,2017,36(5):451-459. |
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| 作者姓名： | 吴石头 许春雪 Klaus Simon 肖益林 王亚平 |
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| 作者单位： | Geowissenschaftliches Zentrum, Göttingen Universität, Göttingen 37077, Germany,国家地质实验测试中心, 北京 100037,Geowissenschaftliches Zentrum, Göttingen Universität, Göttingen 37077, Germany,中国科学技术大学地球和空间科学学院, 合肥 安徽 230026,国家地质实验测试中心, 北京 100037 |
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| 基金项目： | 中国地质科学院基本科研业务费项目（YYWF201622）；国家公派留学基金（201306410007）。 |
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| 摘 要： | 探究LA-ICP-MS分析中不同基体的剥蚀行为和剥蚀速率,可为激光参数设定、基体匹配选择、数据质量保证等方面提供重要参考。本文研究了193 nm ArF准分子激光系统对人工合成/地质样品玻璃、常见矿物和粉末压片的剥蚀行为,同时探究了激光参数(束斑直径、能量密度和剥蚀频率)对剥蚀速率的影响情况。从剥蚀坑形貌可知,193nm ArF激光对玻璃和绝大多数矿物的剥蚀行为良好,但对石英相对较差,这可能与石英内含有微观包裹体,剥蚀过程中局部受热不均有关。粉末压片的剥蚀行为呈现出不可控,可通过提高粉末压片的压制压力或降低粉末颗粒的粒径来改善剥蚀行为;当剥蚀深度大于1.5倍束斑直径时,剥蚀速率随剥蚀深度的增加而逐渐减小,剥蚀深度最多可达束斑直径的两倍左右(RESOlution M-50型号激光系统,3.0 J/cm2激光能量密度);剥蚀速率随激光能量密度的增加而增大,但基本不受剥蚀频率(2~20 Hz)影响。不同基体具有特征的剥蚀速率,本文报道了43种基体的剥蚀速率参数,总体而言,NIST系列玻璃的剥蚀速率大于地质样品玻璃,碳酸盐矿物和硫化物矿物大于硅酸岩矿物,粉末压片大于玻璃和常见矿物。
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| 关 键 词： | 193nm ArF 激光 剥蚀行为 剥蚀速率 能量密度 |
| 收稿时间： | 2017/3/29 0:00:00 |
| 修稿时间： | 2017/7/15 0:00:00 |
Study on Ablation Behaviors and Ablation Rates of a 193nm ArF Excimer Laser System for Selected Substrates in LA-ICP-MS Analysis |
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| WU Shi-tou,XU Chun-xue,Klaus Simon,XIAO Yi-lin and WANG Ya-ping.Study on Ablation Behaviors and Ablation Rates of a 193nm ArF Excimer Laser System for Selected Substrates in LA-ICP-MS Analysis[J].Rock and Mineral Analysis,2017,36(5):451-459. |
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| Authors: | WU Shi-tou XU Chun-xue Klaus Simon XIAO Yi-lin and WANG Ya-ping |
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| Institution: | Geowissenschaftliches Zentrum, Göttingen Universitt, Göttingen 37077, Germany,National Research Center for Geoanalysis, Beijing 100037, China,Geowissenschaftliches Zentrum, Göttingen Universitt, Göttingen 37077, Germany,School of Earth and Space Sciences, University of Science and Technology of China, Hefei 230026, China and National Research Center for Geoanalysis, Beijing 100037, China |
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| Abstract: | Understanding laser ablation behaviors of different target materials is essential for optimum laser parameters, external reference materials selection, as well as for data quality assurance. In this study, ablation behaviors of a 193nm ArF excimer laser for silicate glasses, common minerals, and powder pellets were investigated. Ablation rates influenced by laser parameters (including spot size, energy density, and laser frequency) were evaluated. Topographic images of craters generated during ablation illustrate that glasses and most minerals have controllable ablation behaviors, except for quartz. The worse ablation behavior of quartz may be ascribed to the micro-fluid inclusions, which could result in the overheating effect in laser pits. In general, powder pellets have worse ablation behaviors, but the increase of tableting pressure or reducing the particle grain size could improve the ablation behaviors. Ablation rates gradually decrease if the ablation depth is larger than 1.5 times of the spot size. The maximum ablation depth can reach twice the spot size when the energy density is 3.0 J/cm2 for the RESOlution M-50 laser system). Ablation rates increase with the increase of laser energy density, but ablation rates are not affected by the laser frequency (2-20 Hz). Ablation rates are specific to the individual substrates. In conclusion, the ablation rate data of 43 substrates, in which ablation rates of powder pellets are larger than glasses and minerals, whereas those of carbonates and sulfides are larger than silicate minerals, and those of NIST glasses are larger than geological glasses. |
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| Keywords: | 193nm ArF excimer laser ablation behavior ablation rate energy density |
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