| 基于微电子系统（MEMS）加速度地震勘探三分量数字检波器简介 |
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| 引用本文： | 张莉,解文荣,李秀荣.基于微电子系统（MEMS）加速度地震勘探三分量数字检波器简介[J].中国煤田地质,2006,18(2):57-59. |
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| 作者姓名： | 张莉 解文荣 李秀荣 |
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| 作者单位： | 山东省煤田物探测量队,山东泰安271021 |
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| 摘 要： | 基于微电子机械系统（MEMS）制成的微加速度三分量数字地震检波器。集数据采集、处理及传输功能干一体，在结构模型、工作原理、性能指标控制等方面不同于常规检波器，其信号幅值在低于自然频率范围内没有衰减。因其独特的制造技术，MEMS检波器具有超低噪声，大动态范围和极高的向量保真度性能。
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| 关 键 词： | MEMS 传感器 三分量数字检波器 地震仪器 |
| 文章编号： | 1004-9177（2006）02-00057-03 |
| 收稿时间： | 2006-01-12 |
| 修稿时间： | 2006年1月12日 |
A Brief Introduction to Acceleration Triaxial Digital Geophone Based on Microelectronic Mechanical System(MEMS) |
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| Zhang Li, Xie Wenrong , Li Xiurong.A Brief Introduction to Acceleration Triaxial Digital Geophone Based on Microelectronic Mechanical System(MEMS)[J].Coal Geology of China,2006,18(2):57-59. |
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| Authors: | Zhang Li Xie Wenrong Li Xiurong |
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| Institution: | Shandong Coalfield Geophysical Prospecting and Surveying Team, Taian, Shandong 271021 |
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| Abstract: | The acceleration triaxial digital geophone based on microelectronic mechanical system(MEMS) is a geophone concentrating three functions of data gathering,processing and transferring in one.It is different from traditional geophone on aspects of structure model,operational principle and performance indices controlling.Its signal peak value will not be attenuated when it is negative to free frequency.Since its unique manufacturing technology,the MEMS geophone has ultra-low noise,larger dynamic range and very high vectorial fidelity performances. |
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| Keywords: | MEMS sensor triaxial digital geophone seismologic instrument |
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