| 任意结构的电容耦合直流放电的数值模拟 |
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| 引用本文： | 凌长明,闵春华.任意结构的电容耦合直流放电的数值模拟[J].广东海洋大学学报,2001,21(2):53-57. |
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| 作者姓名： | 凌长明 闵春华 |
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| 作者单位： | 湛江海洋大学工程学院, |
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| 摘 要： | 本文描述了二维模型下电容耦合的直流放电计算过程.发展了适用于任意结构下非正交坐标系的算法.提出了决定边界条件的相关技术.程序设计中发展了网格生成系统,使程序更适用.并且用图表说明了半导体机械中的一种典型的应用.
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| 关 键 词： | 直流放电 二维模型 适体坐标 |
| 文章编号： | 1007-7995(2001)02-0053-05 |
| 修稿时间： | 2001年2月16日 |
Numerical Simulation of Capacitively Coupled DC Discharge in Arbitrary Configuration |
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| Ling Changming,Min Chunhua.Numerical Simulation of Capacitively Coupled DC Discharge in Arbitrary Configuration[J].Journal of Zhanjiang Ocean University,2001,21(2):53-57. |
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| Authors: | Ling Changming Min Chunhua |
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| Abstract: | A calculation procedure for capacitively coupled DC discharge has been described under the two dimensional model. The scheme has been developed for a non-orthogonal coordinate system in arbitrary configurations. The relevant technique of determine the boundary condition has been adopted. In order to be a more flexible design, the grid generation system has also been developed in the program. A typical application in semiconductor machine has been illustrated. |
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| Keywords: | DC Discharge Two dimensional model Body fitted coordinate |
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